Publication:
Interfacial properties of ZrO2 on silicon
Date
| dc.contributor.author | Lin, Y.S. | |
| dc.contributor.author | Puthenkovilakam, R. | |
| dc.contributor.author | Chang, J.P. | |
| dc.contributor.author | Bouldin, C. | |
| dc.contributor.author | Levin, I. | |
| dc.contributor.author | Nguyen, N.V. | |
| dc.contributor.author | Ehrstein, J. | |
| dc.contributor.author | Sun, Y. | |
| dc.contributor.author | Pianetta, P. | |
| dc.contributor.author | Conard, Thierry | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Venturo, V. | |
| dc.contributor.author | Selbrede, S. | |
| dc.contributor.imecauthor | Conard, Thierry | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
| dc.date.accessioned | 2021-10-15T05:23:56Z | |
| dc.date.available | 2021-10-15T05:23:56Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7805 | |
| dc.source.beginpage | 5945 | |
| dc.source.endpage | 2952 | |
| dc.source.issue | 10 | |
| dc.source.journal | Journal of Applied Physics | |
| dc.source.volume | 93 | |
| dc.title | Interfacial properties of ZrO2 on silicon | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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