Browsing by author "Misat, Sylvain Irénée"
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Resolving line collapse in 193nm lithography with surfactinated post develop rinse solutions
Versluijs, Janko; Misat, Sylvain Irénée; Maenhoudt, Mireille; Grozev, Grozdan; Furusho, Tetsunari (2003)