Browsing by author "Chen, L."
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SLM device for 193 nm lithographic applications
Lauria, John; Albright, R.; Vladimirsky, O.; Hoeks, M.; Vanneer, R.; van Drieenhuizen, B.; Chen, L.; Haspeslagh, Luc; Witvrouw, Ann (2009)
Now showing items 1-1 of 1