Browsing by author "Mehta, Sandeep"
Now showing items 1-3 of 3
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Advanced processes for Si:P and Si:C:P epitaxial growth and low-temperature surface cleaning
Profijt, Harald; Rosseel, Erik; Tolle, John; Weeks, K.D.; Loo, Roger; Mehta, Sandeep; Maes, Jan (2014-11) -
Characterization of epitaxial Si:C:P and SI:P layers for source/drain formation in advanced bulk FinFETs
Rosseel, Erik; Profijt, Harald; Hikavyy, Andriy; Tolle, John; Kubicek, Stefan; Mannaert, Geert; L'abbe, Caroline; Wostyn, Kurt; Horiguchi, Naoto; Clarysse, Trudo; Parmentier, Brigitte; Dhayalan, Sathish Kumar; Bender, Hugo; Maes, Jan; Mehta, Sandeep; Loo, Roger (2014-10) -
Low-temperature pre-epitaxy surface cleaning of Si and SiGe
Profijt, Harald; Suhard, Samuel; Rosseel, Erik; Tolle, John; Mertens, Hans; Dhayalan, Sathish Kumar; Hikavyy, Andriy; Weeks, Doran; Holsteyns, Frank; Loo, Roger; Mehta, Sandeep; Maes, Jan (2015-05)