Publication:

Characterization of epitaxial Si:C:P and SI:P layers for source/drain formation in advanced bulk FinFETs

Date

2014-10

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

;

Profijt, Harald

;

Hikavyy, Andriy

;

;

Kubicek, Stefan

;

Mannaert, Geert

;

L'abbe, Caroline

;

;

Horiguchi, Naoto

;

Clarysse, Trudo

;

Parmentier, Brigitte

;

Dhayalan, Sathish Kumar

;

;

;

;

Statistics

2026 since deposited on 2021-10-22

Acq. date: 2026-02-25