Publication:
Characterization of epitaxial Si:C:P and SI:P layers for source/drain formation in advanced bulk FinFETs
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2022 since deposited on 2021-10-22
4last month
2last week
Acq. date: 2025-12-14
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Views
2022 since deposited on 2021-10-22
4last month
2last week
Acq. date: 2025-12-14
Citations