Publication:
Characterization of epitaxial Si:C:P and SI:P layers for source/drain formation in advanced bulk FinFETs
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2015 since deposited on 2021-10-22
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Acq. date: 2025-10-25
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Metrics
Views
2015 since deposited on 2021-10-22
448item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations