Browsing by author "Park, Sang-il"
Now showing items 1-5 of 5
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Atomic resolution quality control for Fin oxide recess by atomic resolution profiler
Kim, Tae-Gon; Ryu, Heon-Yul; Kenis, Karine; Jo, Ah-jin; Cho, Sang-Joon; Park, Sang-il; Schmidt, Sebastian; Irmer, Bernd (2016) -
In-line 3D AFM for critical dimension and sidewall roughness of Si photonic waveguide and correlation with its propagation loss
Kim, Tae-Gon; Verheyen, Peter; De Heyn, Peter; Vandeweyer, Tom; Miller, Andy; Pantouvaki, Marianna; Van Campenhout, Joris; Jo, Ahjin; Cho, Sangjoon; Park, Sang-il (2017) -
In-line atomic resolution local nanotopography variation metrology for CMP process
Kim, Tae-Gon; Heylen, Nancy; Kim, Soon-Wook; Vandeweyer, Tom; Jo, Ah-jin; Lee, Ju Suk; Ahn, Byoung-Woon; Cho, Sang-Joon; Park, Sang-il; Imer, Bernd; Shmidt, Sebastian (2017) -
In-line critical dimension and sidewall roughness metrology study for compound nanostructure process control by in-line 3D atomic force microscopy
Kim, Tae-Gon; Ryu, Henry; Jo, Ah-jin; Cho, Sang-Joon; Park, Sang-il; Vandeweyer, Tom (2016) -
In-line metrology for atomic resolution local height variation
Kim, Tae-Gon; Kim, Soon-Wook; Vandeweyer, Tom; Jo, Ah-jin; Lee, Ju Suk; Ahn, Byoung-Woon; Zandiatashbar, Ardavan; Cho, Sang-Joon; Park, Sang-il; Irmer, Bernd; Schmidt, Sebastian (2017)