In-line metrology for atomic resolution local height variation

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Authors
Kim, Tae-Gon; Kim, Soon-Wook; Vandeweyer, Tom; Jo, Ah-jin; Lee, Ju Suk; Ahn, Byoung-Woon; Zandiatashbar, Ardavan; Cho, Sang-Joon; Park, Sang-il; Irmer, Bernd; Schmidt, Sebastian
Conference
28th Annual SEMI Advanced Semiconductor Manufacturing Conference - ASMC
Title
In-line metrology for atomic resolution local height variation
Publication type
Proceedings paper
Embargo date
9999-12-31
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