Browsing by author "Fouere, J.C."

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High-k dielectric characterization by combined VUV spectroscopic ellipsometry and X-ray reflectometry

Boher, P.; Evrard, P.; Defranoux, C.; Darragon, A.; Sun, Lianchao; Fouere, J.C.; Stehlé, J.L.; Bellandi, E.; Bender, Hugo (2003-12)
High-k dielectric characterization by VUV spectroscopic ellipsometry and X-ray reflection

Boher, P.; Evrard, P.; Defranoux, C.; Fouere, J.C.; Bellandi, E.; Bender, Hugo (2003)