Publication:
High-k dielectric characterization by VUV spectroscopic ellipsometry and X-ray reflection
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1920 since deposited on 2021-10-15
1last month
Acq. date: 2026-09-14
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Statistics
Views
1920 since deposited on 2021-10-15
1last month
Acq. date: 2026-09-14
Citations