High-k dielectric characterization by VUV spectroscopic ellipsometry and X-ray reflection

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Authors
Boher, P.; Evrard, P.; Defranoux, C.; Fouere, J.C.; Bellandi, E.; Bender, Hugo
Conference
Characterization and Metrology of ULSI Technology
Title
High-k dielectric characterization by VUV spectroscopic ellipsometry and X-ray reflection
Publication type
Proceedings paper
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