Publication:

High-k dielectric characterization by VUV spectroscopic ellipsometry and X-ray reflection

Date

2003

Proceedings Paper

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Author(s)

Boher, P.

;

Evrard, P.

;

Defranoux, C.

;

Fouere, J.C.

;

Bellandi, E.

;

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1920 since deposited on 2021-10-15

Acq. date: 2026-10-05