Browsing by author "Krasnova, Polina"

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Calibration and application of a DSA Compact model for grapho-epitaxy hole processes using contour-based metrology

Fenger, Germain; Burbine, Andrew; Torres, J. Andres; Ma, Yuansheng; Granik, Yuri; Krasnova, Polina; Vandenberghe, Geert; Gronheid, Roel; Bekaert, Joost (2014)
Validation of improved compact model in grapho-epitaxy Directed-Self-Assembly (DSA)

Fenger, Germain; Bekaert, Joost; Torres, Andres; Granik, Yuri; Krasnova, Polina; Doise, Jan; Boeckx, Carolien; Vandenberghe, Geert; Gronheid, Roel (2015)