Validation of improved compact model in grapho-epitaxy Directed-Self-Assembly (DSA)

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Authors
Fenger, Germain; Bekaert, Joost; Torres, Andres; Granik, Yuri; Krasnova, Polina; Doise, Jan; Boeckx, Carolien; Vandenberghe, Geert; Gronheid, Roel
Conference
1st International Symposium on DSA
Title
Validation of improved compact model in grapho-epitaxy Directed-Self-Assembly (DSA)
Publication type
Proceedings paper
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