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Validation of improved compact model in grapho-epitaxy Directed-Self-Assembly (DSA)

Date

2015
Proceedings Paper
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dc.contributor.authorFenger, Germain
dc.contributor.authorBekaert, Joost
dc.contributor.authorTorres, Andres
dc.contributor.authorGranik, Yuri
dc.contributor.authorKrasnova, Polina
dc.contributor.authorDoise, Jan
dc.contributor.authorBoeckx, Carolien
dc.contributor.authorVandenberghe, Geert
dc.contributor.authorGronheid, Roel
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorDoise, Jan
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.imecauthorGronheid, Roel
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.date.accessioned2021-10-22T19:14:30Z
dc.date.available2021-10-22T19:14:30Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25268
dc.source.conference1st International Symposium on DSA
dc.source.conferencedate26/10/2015
dc.source.conferencelocationLeuven Belgium
dc.title

Validation of improved compact model in grapho-epitaxy Directed-Self-Assembly (DSA)

dc.typeProceedings paper
dspace.entity.typePublication
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