Browsing by author "Johnson, Stephen"

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Complementary dipole exposure solutions at 0.29k1

Hendrickx, Eric; Torres, Andres; Lafferty, Neal; Le Cam, Laurent; Johnson, Stephen; Reita, Carlo; Vandenberghe, Geert; Maurer, Wilhelm (2005)
Through-pitch characterization and printability for 65nm half-pitch alternating aperture phase shift applications

Philipsen, Vicky; Leunissen, Peter; De Ruyter, Rudi; Jonckheere, Rik; Martin, Patrick; Wakefield, Clare; Johnson, Stephen; Cangemi, Mike; Buxbaum, Alex; Morrison, Troy (2005)