Browsing by author "Schoofs, Stijn"

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Early defect detection for EUV self-aligned litho-etch litho-etch patterning with EPE

Anunciado, Roy; Lee, Jisun; Barzegar, Ellaheh; van der Sanden, Stefan; Schelcher, Guillaume; Schoofs, Stijn (2022)
Feature grouping to enable edge placement error-aware process control in multi-feature logic use case

Schelcher, Guillaume; Athayde, Marsil; Schoofs, Stijn; Hsia, Jeff; Khalik, Zuan; Li, Fahong; Nechaev, Konstantin; Sahraeian, Reza; Tamaddon, Amir-Hossein; Blanco, Victor; van der Sanden, Stefan; Zhang, Yichen; Anunciado, Roy; Dillen, Harm; Leray, Philippe (2024)