Authors
Schelcher, Guillaume;
Athayde, Marsil;
Schoofs, Stijn;
Hsia, Jeff;
Khalik, Zuan;
Li, Fahong;
Nechaev, Konstantin;
Sahraeian, Reza;
Tamaddon, Amir-Hossein;
Blanco, Victor;
van der Sanden, Stefan;
Zhang, Yichen;
Anunciado, Roy;
Dillen, Harm;
Leray, Philippe
EISBN
978-1-5106-7217-8
ISBN
978-1-5106-7216-1
ISSN
0277-786X
Conference
Conference on Metrology, Inspection, and Process Control XXXVIII
Journal
Proceedings of SPIE
Volume
12955
Title
Feature grouping to enable edge placement error-aware process control in multi-feature logic use case
Publication type
Proceedings paper
Embargo date
2024-09-08