Browsing by author "Tamaddon, Amir-Hossein"

Alignment and overlay through opaque metal layers

Blanco, Victor; Canga, Eren; Jehoul, Christiane; Moussa, Alain; Tamaddon, Amir-Hossein; Tabery, C.; Gunjala, G.; Menchtchikov, B.; Zacca, V. G.; Lalbahadoersing, S.; den Boef, A.; Synowicky, R. (2023)

Contact resistance modeling for NEMS ohmic relays using highly doped SiGe contact

Ramezani, Maliheh; Severi, Simone; Tamaddon, Amir-Hossein; Vanstreels, Kris; Tilmans, Harrie; Rottenberg, Xavier; De Meyer, Kristin; Witvrouw, Ann (2013)

Dynamics of the defects left by a residual droplet on photoresist-coated substrates

Belmiloud, Naser; Tamaddon, Amir-Hossein; Mertens, Paul; Struyf, Herbert (2012)

Dynamics of the drying defects left by residual ultra-pure water droplets on silicon substrate

Belmiloud, Naser; Tamaddon, Amir-Hossein; Mertens, Paul; Struyf, Herbert; Xu, XiuMei (2012)

Effect of the surface/water chemistry on the creation of watermarks

Belmiloud, Naser; Tamaddon, Amir-Hossein; Mertens, Paul; Struyf, Herbert (2012)

Effect of the surface/water chemistry on the creation of watermarks

Belmiloud, Naser; Tamaddon, Amir-Hossein; Mertens, Paul; Struyf, Herbert (2013)

Evaluation of high-speed linear air-knife based wafer dryer

Tamaddon, Amir-Hossein; Belmiloud, Naser; Doumen, Geert; Struyf, Herbert; Mertens, Paul; Heyns, Marc (2012)

Evaluation of high-speed linear air-knife based wafer dryer

Tamaddon, Amir-Hossein; Belmiloud, Naser; Doumen, Geert; Struyf, Herbert; Mertens, Paul; Heyns, Marc (2013)

Exploration of EUV-based self-aligned multipatterning (SAMP) options targeting pitches below 20 nm

Decoster, Stefan; Lazzarino, Frederic; Vangoidsenhoven, Diziana; Blanco, Victor; Tamaddon, Amir-Hossein; Kesters, Els; Lorant, Christophe (2019)

Feature grouping to enable edge placement error-aware process control in multi-feature logic use case

Schelcher, Guillaume; Athayde, Marsil; Schoofs, Stijn; Hsia, Jeff; Khalik, Zuan; Li, Fahong; Nechaev, Konstantin; Sahraeian, Reza; Tamaddon, Amir-Hossein; Blanco, Victor; van der Sanden, Stefan; Zhang, Yichen; Anunciado, Roy; Dillen, Harm; Leray, Philippe (2024)

Highly doped-SiGe as a potential contact material in NEMS ohmic switches: a novel method for contact resistance prediction

Ramezani, Maliheh; Tamaddon, Amir-Hossein; Severi, Simone; Vanstreels, Kris; De Meyer, Kristin; Witvrouw, Ann (2013)

Investigation on the drying dynamics of millimetric water droplets: source of watermarks on silicon wafers

Belmiloud, Naser; Tamaddon, Amir-Hossein; Mertens, Paul; Xu, XiuMei; Struyf, Herbert (2011)

Investigation on the drying dynamics of millimetric water droplets: source of watermarks on silicon wafers

Belmiloud, Naser; Mertens, Paul; Tamaddon, Amir-Hossein; Struyf, Herbert (2011)

Leaching and drying marks on photoresist-coated substrates

Belmiloud, Naser; Tamaddon, Amir-Hossein; Mertens, Paul; Struyf, Herbert (2014)

Role of ambient composition on the formation and shape of watermarks on a bare silicon substrate

Tamaddon, Amir-Hossein; Mertens, Paul; Vermant, Jan; Vereecke, Guy; Holsteyns, Frank; Heyns, Marc; De Gendt, Stefan (2014)

Staggered pillar patterning using 0.33NA EUV lithography

De Simone, Danilo; Blanc, Romuald; Van de Kerkhove, Jeroen; Tamaddon, Amir-Hossein; Fallica, Roberto; Van Look, Lieve; Rassoul, Nouredine; Lazzarino, Frederic; Vandenbroeck, Nadia; Vanelderen, Pieter; Lorusso, Gian; Van Roey, Frieda; Charley, Anne-Laure; Vandenberghe, Geert; Ronse, Kurt; Lee, Kilyoung; Lee, Junghyung; Park, Sarohan; Lim, Chang-Moon; Park, Chan-Ha (2019)