Watermark formation on bare silicon: Impact of illumination and substrate doping

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Authors
Tamaddon, Amir-Hossein; Philipsen, Harold; Mertens, Paul; Holsteyns, Frank; Heyns, Marc; De Gendt, Stefan; van Dorp, Dennis
Conference
Ultra Clean Processing of Semiconductor Surfaces XII - UCPSS
Title
Watermark formation on bare silicon: Impact of illumination and substrate doping
Publication type
Proceedings paper
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