Authors

Tamaddon, Amir-Hossein; Mertens, Paul; Vereecke, Guy; Holsteyns, Frank; De Gendt, Stefan; Heyns, Marc

Conference

224th Electrochemical society meeting, 13th International Symposium on Semiconductor Cleaning Science and Technology (SCST13)

Title

Watermark formation mechanism by evaporation of ultra-pure water: Study the effect of ambient

Publication type

Meeting abstract

Embargo date

9999-12-31