Publication:

Staggered pillar patterning using 0.33NA EUV lithography

Date

2019
Proceedings Paper
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Author(s)

De Simone, Danilo  
;
Blanc, Romuald  
;
Van de Kerkhove, Jeroen  
;
Tamaddon, Amir-Hossein  
;
Fallica, Roberto  
;
Van Look, Lieve  
;
Rassoul, Nouredine  
;
Lazzarino, Frederic  
;
Vandenbroeck, Nadia  
;
Vanelderen, Pieter  
;
Lorusso, Gian  
;
Van Roey, Frieda  
;
Charley, Anne-Laure  
;
Vandenberghe, Geert  
;
Ronse, Kurt  
;
Lee, Kilyoung
;
Lee, Junghyung
;
Park, Sarohan
;
Lim, Chang-Moon
;
Park, Chan-Ha

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1923 since deposited on 2021-10-27
3last month
Acq. date: 2026-10-08

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