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Staggered pillar patterning using 0.33NA EUV lithography
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Authors
De Simone, Danilo
;
Blanc, Romuald
;
Van de Kerkhove, Jeroen
;
Tamaddon, Amir-Hossein
;
Fallica, Roberto
;
Van Look, Lieve
;
Rassoul, Nouredine
;
Lazzarino, Frederic
;
Vandenbroeck, Nadia
;
Vanelderen, Pieter
;
Lorusso, Gian
;
Van Roey, Frieda
;
Charley, Anne-Laure
;
Vandenberghe, Geert
;
Ronse, Kurt
;
Lee, Kilyoung
;
Lee, Junghyung
;
Park, Sarohan
;
Lim, Chang-Moon
;
Park, Chan-Ha
Conference
Extreme Ultraviolet (EUV) Lithography X
Title
Staggered pillar patterning using 0.33NA EUV lithography
Publication type
Proceedings paper
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