Browsing by author "Schelcher, Guillaume"
Now showing items 1-4 of 4
-
E-TEST validation of EPE budget and metrology
De Poortere, Etienne; Schelcher, Guillaume; Kissoon, Nicola; Paolillo, Sara; Tabery, Cyrus; Halder, Sandip; Leray, Philippe; Mulkens, Jan; McManus, Moyra (2020) -
E-test validation of space error budget and metrology
Schelcher, Guillaume; De Poortere, Etienne P.; Kissoon, Nicola; Paolillo, Sara; e Silva, Marsil A. C.; Zhang, Yichen; Tabery, Cyrus; Mulkens, Jan; McManus, Moyra; Leray, Philippe; Halder, Sandip (2022-06-30) -
Early defect detection for EUV self-aligned litho-etch litho-etch patterning with EPE
Anunciado, Roy; Lee, Jisun; Barzegar, Ellaheh; van der Sanden, Stefan; Schelcher, Guillaume; Schoofs, Stijn (2022) -
Feature grouping to enable edge placement error-aware process control in multi-feature logic use case
Schelcher, Guillaume; Athayde, Marsil; Schoofs, Stijn; Hsia, Jeff; Khalik, Zuan; Li, Fahong; Nechaev, Konstantin; Sahraeian, Reza; Tamaddon, Amir-Hossein; Blanco, Victor; van der Sanden, Stefan; Zhang, Yichen; Anunciado, Roy; Dillen, Harm; Leray, Philippe (2024)