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E-test validation of space error budget and metrology
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Authors
Schelcher, Guillaume
;
De Poortere, Etienne P.
;
Kissoon, Nicola
;
Paolillo, Sara
;
e Silva, Marsil A. C.
;
Zhang, Yichen
;
Tabery, Cyrus
;
Mulkens, Jan
;
McManus, Moyra
;
Leray, Philippe
;
Halder, Sandip
DOI
10.1109/TSM.2022.3187448
ISSN
0894-6507
Issue
3
Journal
IEEE Transactions on Semiconductor Manufacturing
Volume
35
Research discipline
Electrical & electronic engineering
Title
E-test validation of space error budget and metrology
Publication type
Journal article
Embargo date
2022-08-31
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2
20.500.12860/40234.2
*
2022-09-01T10:40:39Z
validation by library/open access desk
1
20.500.12860/40234
2022-08-08T07:12:19Z
*Selected version
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