dc.contributor.author | Schelcher, Guillaume | |
dc.contributor.author | De Poortere, Etienne P. | |
dc.contributor.author | Kissoon, Nicola | |
dc.contributor.author | Paolillo, Sara | |
dc.contributor.author | e Silva, Marsil A. C. | |
dc.contributor.author | Zhang, Yichen | |
dc.contributor.author | Tabery, Cyrus | |
dc.contributor.author | Mulkens, Jan | |
dc.contributor.author | McManus, Moyra | |
dc.contributor.author | Leray, Philippe | |
dc.contributor.author | Halder, Sandip | |
dc.date.accessioned | 2022-09-01T10:51:26Z | |
dc.date.available | 2022-08-08T07:12:19Z | |
dc.date.available | 2022-09-01T10:51:26Z | |
dc.date.issued | 2022-06-30 | |
dc.identifier.issn | 0894-6507 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40234.2 | |
dc.title | E-test validation of space error budget and metrology | |
dc.type | Journal article | |
dc.contributor.imecauthor | Schelcher, Guillaume | |
dc.contributor.imecauthor | Paolillo, Sara | |
dc.contributor.imecauthor | Leray, Philippe | |
dc.contributor.imecauthor | Halder, Sandip | |
dc.contributor.orcidimec | Leray, Philippe::0000-0002-1086-270X | |
dc.contributor.orcidimec | Halder, Sandip::0000-0002-6314-2685 | |
dc.contributor.orcidimec | Schelcher, Guillaume::0000-0003-3383-1049 | |
dc.date.embargo | 2022-08-31 | |
dc.identifier.doi | 10.1109/TSM.2022.3187448 | |
dc.source.numberofpages | 7 | |
dc.source.peerreview | yes | |
dc.subject.discipline | Electrical & electronic engineering | |
dc.source.beginpage | 478 | |
dc.source.endpage | 484 | |
dc.source.journal | IEEE Transactions on Semiconductor Manufacturing | |
dc.source.issue | 3 | |
dc.source.volume | 35 | |
imec.availability | Published - open access | |