E-test validation of space error budget and metrology

Schelcher, Guillaume; De Poortere, Etienne P.; Kissoon, Nicola; Paolillo, Sara; e Silva, Marsil A. C.; Zhang, Yichen; Tabery, Cyrus; Mulkens, Jan; McManus, Moyra; Leray, Philippe; Halder, Sandip

doi:10.1109/TSM.2022.3187448

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E-test validation of space error budget and metrology

Date

2022-06-30

Journal article

https://doi.org/10.1109/TSM.2022.3187448

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Schelcher, Guillaume

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De Poortere, Etienne P.

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Kissoon, Nicola

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Paolillo, Sara

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e Silva, Marsil A. C.

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IEEE Transactions on Semiconductor Manufacturing

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270 since deposited on 2022-08-08

33last month

6last week

Acq. date: 2026-01-09

1680 since deposited on 2022-08-08

Acq. date: 2026-01-09

E-test validation of space error budget and metrology

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