Publication:

E-test validation of space error budget and metrology

Date

2022-06-30
Journal article
https://doi.org/10.1109/TSM.2022.3187448
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dc.contributor.authorSchelcher, Guillaume
dc.contributor.authorDe Poortere, Etienne P.
dc.contributor.authorKissoon, Nicola
dc.contributor.authorPaolillo, Sara
dc.contributor.authore Silva, Marsil A. C.
dc.contributor.authorZhang, Yichen
dc.contributor.authorTabery, Cyrus
dc.contributor.authorMulkens, Jan
dc.contributor.authorMcManus, Moyra
dc.contributor.authorLeray, Philippe
dc.contributor.authorHalder, Sandip
dc.contributor.imecauthorSchelcher, Guillaume
dc.contributor.imecauthorPaolillo, Sara
dc.contributor.imecauthorLeray, Philippe
dc.contributor.imecauthorHalder, Sandip
dc.contributor.orcidimecLeray, Philippe::0000-0002-1086-270X
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.contributor.orcidimecSchelcher, Guillaume::0000-0003-3383-1049
dc.date.accessioned2022-09-01T10:51:26Z
dc.date.available2022-08-08T07:12:19Z
dc.date.available2022-09-01T10:51:26Z
dc.date.embargo2022-08-31
dc.date.issued2022-06-30
dc.identifier.doi10.1109/TSM.2022.3187448
dc.identifier.issn0894-6507
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40234
dc.source.beginpage478
dc.source.endpage484
dc.source.issue3
dc.source.journalIEEE Transactions on Semiconductor Manufacturing
dc.source.numberofpages7
dc.source.volume35
dc.subject.disciplineElectrical & electronic engineering
dc.subject.keywordsMetrology
dc.subject.keywordsSpace Error
dc.subject.keywordsEdge Placement Error
dc.subject.keywordsElectrical test device
dc.title

E-test validation of space error budget and metrology

dc.typeJournal article
dspace.entity.typePublication
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