Publication:

E-test validation of space error budget and metrology

Date

2022
Journal article
https://doi.org/10.1109/tsm.2022.3187448
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Accepted version 2.22 MB

Author(s)

Schelcher, Guillaume  
;
De Poortere, Etienne P.
;
Kissoon, Nicola
;
Paolillo, Sara  
;
e Silva, Marsil A. C.
;
Zhang, Yichen
;
Tabery, Cyrus
;
Mulkens, Jan
;
McManus, Moyra
;
Leray, Philippe  
;
Halder, Sandip  

Journal

IEEE Transactions on Semiconductor Manufacturing

Abstract

Description

Statistics

Downloads

495 since deposited on 2022-08-08
23last month
Acq. date: 2026-09-20

Views

1704 since deposited on 2022-08-08
8last month
2last week
Acq. date: 2026-09-20

Citations

Statistics

Downloads

495 since deposited on 2022-08-08
23last month
Acq. date: 2026-09-20

Views

1704 since deposited on 2022-08-08
8last month
2last week
Acq. date: 2026-09-20

Citations