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E-test validation of space error budget and metrology
Publication:
E-test validation of space error budget and metrology
Date
2022-06-30
Journal article
https://doi.org/10.1109/TSM.2022.3187448
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2.22 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Schelcher, Guillaume
;
De Poortere, Etienne P.
;
Kissoon, Nicola
;
Paolillo, Sara
;
e Silva, Marsil A. C.
;
Zhang, Yichen
;
Tabery, Cyrus
;
Mulkens, Jan
;
McManus, Moyra
;
Leray, Philippe
;
Halder, Sandip
Journal
IEEE Transactions on Semiconductor Manufacturing
Abstract
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141
since deposited on 2022-08-08
Acq. date: 2025-10-23
Views
1677
since deposited on 2022-08-08
Acq. date: 2025-10-23
Citations
Metrics
Downloads
141
since deposited on 2022-08-08
Acq. date: 2025-10-23
Views
1677
since deposited on 2022-08-08
Acq. date: 2025-10-23
Citations