Browsing by author "De Poortere, Etienne P."

Now showing items 1-2 of 2

E-test validation of space error budget and metrology

Schelcher, Guillaume; De Poortere, Etienne P.; Kissoon, Nicola; Paolillo, Sara; e Silva, Marsil A. C.; Zhang, Yichen; Tabery, Cyrus; Mulkens, Jan; McManus, Moyra; Leray, Philippe; Halder, Sandip (2022-06-30)
Voltage contrast determination of design rules at the limits of EUV single patterning

Blanco, Victor; De Poortere, Etienne P.; Leray, Philippe; Cerbu, Dorin; van de Kerkhove, Jeroen; Kissoon, Nicola N. (2023)