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Voltage contrast determination of design rules at the limits of EUV single patterning
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Authors
Blanco, Victor
;
De Poortere, Etienne P.
;
Leray, Philippe
;
Cerbu, Dorin
;
van de Kerkhove, Jeroen
;
Kissoon, Nicola N.
DOI
10.1117/1.JMM.22.4.041604
ISSN
1932-5150
Issue
4
Journal
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
Volume
22
Title
Voltage contrast determination of design rules at the limits of EUV single patterning
Publication type
Journal article
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2
20.500.12860/43595.2
*
2024-03-25T12:46:17Z
validation by library/open access desk
1
20.500.12860/43595
2024-02-27T17:42:52Z
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