Publication:

Voltage contrast determination of design rules at the limits of EUV single patterning

Date

2023
Journal article
https://doi.org/10.1117/1.JMM.22.4.041604
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Blanco, Victor  
;
De Poortere, Etienne P.
;
Leray, Philippe  
;
Cerbu, Dorin  
;
van de Kerkhove, Jeroen
;
Kissoon, Nicola N.

Journal

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

Abstract

Description

Metrics

Views

866 since deposited on 2024-02-27
3last month
1last week
Acq. date: 2026-01-09

Citations

Metrics

Views

866 since deposited on 2024-02-27
3last month
1last week
Acq. date: 2026-01-09

Citations