Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Voltage contrast determination of design rules at the limits of EUV single patterning
Publication:
Voltage contrast determination of design rules at the limits of EUV single patterning
Date
2023
Journal article
https://doi.org/10.1117/1.JMM.22.4.041604
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Blanco, Victor
;
De Poortere, Etienne P.
;
Leray, Philippe
;
Cerbu, Dorin
;
van de Kerkhove, Jeroen
;
Kissoon, Nicola N.
Journal
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
Abstract
Description
Metrics
Views
861
since deposited on 2024-02-27
Acq. date: 2025-10-23
Citations
Metrics
Views
861
since deposited on 2024-02-27
Acq. date: 2025-10-23
Citations