Publication:

Voltage contrast determination of design rules at the limits of EUV single patterning

Date

2023
Journal article
https://doi.org/10.1117/1.JMM.22.4.041604
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Author(s)

Blanco, Victor  
;
De Poortere, Etienne P.
;
Leray, Philippe  
;
Cerbu, Dorin  
;
van de Kerkhove, Jeroen
;
Kissoon, Nicola N.

Journal

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

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866 since deposited on 2024-02-27
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Acq. date: 2026-01-26

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