Browsing by author "Kissoon, Nicola N."
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Image contrast metrology for EUV lithography
Brunner, Timothy A.; Truffert, Vincent; Ausschnitt, Kit; Kissoon, Nicola N.; Duriau, Edouard; Jonckers, Tom; van Look, Lieve; Franke, Joern-Holger (2022-09-29) -
Voltage contrast determination of design rules at the limits of EUV single patterning
Blanco, Victor; De Poortere, Etienne P.; Leray, Philippe; Cerbu, Dorin; van de Kerkhove, Jeroen; Kissoon, Nicola N. (2023)