Browsing by author "Li, Fahong"
Now showing items 1-3 of 3
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3D features measurement using YieldStar, an angle resolved polarized scatterometer
Charley, Anne-Laure; Leray, Philippe; D'have, Koen; Cheng, Shaunee; Hinnen, Paul; Li, Fahong; Vanoppen, Peter; Dusa, Mircea (2011) -
3D features measurement using Yieldstar, an angle resolved polarized scatterometer
Charley, Anne-Laure; Leray, Philippe; D'have, Koen; Cheng, Shaunee; Hinnen, P.; Li, Fahong; Vanoppen, Peter; Dusa, Mircea (2011) -
Feature grouping to enable edge placement error-aware process control in multi-feature logic use case
Schelcher, Guillaume; Athayde, Marsil; Schoofs, Stijn; Hsia, Jeff; Khalik, Zuan; Li, Fahong; Nechaev, Konstantin; Sahraeian, Reza; Tamaddon, Amir-Hossein; Blanco, Victor; van der Sanden, Stefan; Zhang, Yichen; Anunciado, Roy; Dillen, Harm; Leray, Philippe (2024)