3D features measurement using YieldStar, an angle resolved polarized scatterometer

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Authors
Charley, Anne-Laure; Leray, Philippe; D'have, Koen; Cheng, Shaunee; Hinnen, Paul; Li, Fahong; Vanoppen, Peter; Dusa, Mircea
Conference
Metrology, Inspection, and Process Control XXV
Title
3D features measurement using YieldStar, an angle resolved polarized scatterometer
Publication type
Proceedings paper
Embargo date
9999-12-31
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