Publication:

3D features measurement using YieldStar, an angle resolved polarized scatterometer

Date

2011
Proceedings Paper
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21338.pdf 1.42 MB

Author(s)

Charley, Anne-Laure  
;
Leray, Philippe  
;
D'have, Koen  
;
Cheng, Shaunee
;
Hinnen, Paul
;
Li, Fahong
;
Vanoppen, Peter
;
Dusa, Mircea  

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1970 since deposited on 2021-10-19
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