Publication:

3D features measurement using YieldStar, an angle resolved polarized scatterometer

Date

2011

Proceedings Paper

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Files

21338.pdf 1.42 MB

Author(s)

Charley, Anne-Laure

;

Leray, Philippe

;

;

;

;

;

Vanoppen, Peter

;

Statistics

1983 since deposited on 2021-10-19

Acq. date: 2026-09-10