Browsing by author "Athayde, Marsil"
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Feature grouping to enable edge placement error-aware process control in multi-feature logic use case
Schelcher, Guillaume; Athayde, Marsil; Schoofs, Stijn; Hsia, Jeff; Khalik, Zuan; Li, Fahong; Nechaev, Konstantin; Sahraeian, Reza; Tamaddon, Amir-Hossein; Blanco, Victor; van der Sanden, Stefan; Zhang, Yichen; Anunciado, Roy; Dillen, Harm; Leray, Philippe (2024)