Browsing by author "Benjamin, D.I."

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Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum-ultraviolet radiation

Choudhury, F.A.; Nguyen, H.M.; Baklanov, M.R.; de Marneffe, Jean-Francois; Li, W.; Pei, D.; Benjamin, D.I.; Zheng, H.; King, S.W.; Lin, Y.H.; Fung, H.S.; Chen, C.C.; Nishi, Y.; Shohet, J.L. (2016)