Authors

Choudhury, F.A.; Nguyen, H.M.; Baklanov, M.R.; de Marneffe, Jean-Francois; Li, W.; Pei, D.; Benjamin, D.I.; Zheng, H.; King, S.W.; Lin, Y.H.; Fung, H.S.; Chen, C.C.; Nishi, Y.; Shohet, J.L.

ISSN

0003-6951

Issue

12

Journal

Applied Physics Letters

Volume

109

Title

Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum-ultraviolet radiation

Publication type

Journal article

Embargo date

9999-12-31