Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum-ultraviolet radiation

Choudhury, F.A.; Nguyen, H.M.; Baklanov, M.R.; de Marneffe, Jean-Francois; Li, W.; Pei, D.; Benjamin, D.I.; Zheng, H.; King, S.W.; Lin, Y.H.; Fung, H.S.; Chen, C.C.; Nishi, Y.; Shohet, J.L.

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Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum-ultraviolet radiation

Date

2016

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Choudhury, F.A.

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Nguyen, H.M.

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Baklanov, M.R.

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de Marneffe, Jean-Francois

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Journal

Applied Physics Letters

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1896 since deposited on 2021-10-23

Acq. date: 2025-12-11

Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum-ultraviolet radiation

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