Browsing by author "Yamagishi, Hajime"
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Electrical evaluation and TEM/SEm investigation of a bottomless I-PVD Ta(N) barrier in a damascene architecture
Yamagishi, Hajime; Tokei, Zsolt; Beyer, Gerald; Donaton, R. A.; Bender, Hugo; Nogami, T.; Maex, Karen (2000)