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Electrical evaluation and TEM/SEm investigation of a bottomless I-PVD Ta(N) barrier in a damascene architecture
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2005 since deposited on 2021-10-14
1last month
Acq. date: 2026-04-05
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Statistics
Views
2005 since deposited on 2021-10-14
1last month
Acq. date: 2026-04-05
Citations