Publication:
Electrical evaluation and TEM/SEm investigation of a bottomless I-PVD Ta(N) barrier in a damascene architecture
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2007 since deposited on 2021-10-14
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Acq. date: 2026-07-18
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2007 since deposited on 2021-10-14
1last month
1last week
Acq. date: 2026-07-18
Citations