Publication:

Electrical evaluation and TEM/SEm investigation of a bottomless I-PVD Ta(N) barrier in a damascene architecture

Date

2000
Presentation
Simple item page Full metadata Statistics
 
dc.contributor.authorYamagishi, Hajime
dc.contributor.authorTokei, Zsolt
dc.contributor.authorBeyer, Gerald
dc.contributor.authorDonaton, R. A.
dc.contributor.authorBender, Hugo
dc.contributor.authorNogami, T.
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorMaex, Karen
dc.date.accessioned2021-10-14T14:21:44Z
dc.date.available2021-10-14T14:21:44Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4955
dc.source.conferenceAdvanced Metallization Conference; October 2000; San Diego, CA, USA.
dc.source.conferencelocation
dc.title

Electrical evaluation and TEM/SEm investigation of a bottomless I-PVD Ta(N) barrier in a damascene architecture

dc.typeOral presentation
dspace.entity.typePublication
Files
Publication available in collections:
Presentations