Browsing by author "Letertre, Fabrice"

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Germanium deep-submicron pFET and nFET devices with etched TaN metal gate and high-k dielectric, fabricated on germanium-on-insulator substrates

Meuris, Marc; De Jaeger, Brice; Van Steenbergen, Jan; Letertre, Fabrice; Raskin, Geoffroy; Billon, Thierry; Heyns, Marc (2005)