Publication:
Germanium deep-submicron pFET and nFET devices with etched TaN metal gate and high-k dielectric, fabricated on germanium-on-insulator substrates
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1938 since deposited on 2021-10-16
1last month
Acq. date: 2026-04-07
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Statistics
Views
1938 since deposited on 2021-10-16
1last month
Acq. date: 2026-04-07
Citations