Authors

Meuris, Marc; De Jaeger, Brice; Van Steenbergen, Jan; Letertre, Fabrice; Raskin, Geoffroy; Billon, Thierry; Heyns, Marc

Conference

MRS Spring Meeting Symposium G: Advanced Gate Dielectric Stacks on High-Mobility Semiconductors

Title

Germanium deep-submicron pFET and nFET devices with etched TaN metal gate and high-k dielectric, fabricated on germanium-on-insulator substrates

Publication type

Oral presentation