Browsing by author "Sanuki, Hideaki"

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Development on main chain scission resists for high-NA EUV lithography

Shirotori, Akihide; Hoshino, Manabu; Fujimura, Makoto; Yeh, Sin Fu; Suh, Hyo Seon; De Simone, Danilo; Vandenberghe, Geert; Sanuki, Hideaki (2023)
Update on main chain scission resists in Zeon for high-NA EUV lithography

Akihide, Shirotori; Oda, Yuji; Taguchi, Kazunori; Yeh, Sin Fu; Suh, Hyo Seon; De Simone, Danilo; Vandenberghe, Geert; Sanuki, Hideaki (2023)