Browsing by author "Kosugi, Hitoshi"
Now showing items 1-3 of 3
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EUV process sensitivities and optimizations for track processing
Shite, Hideo; Bradon, Neil; Nafus, Kathleen; Kitano, Junichi; Kosugi, Hitoshi; Hermans, Jan; Hendrickx, Eric; Foubert, Philippe; Gronheid, Roel; Jehoul, Christiane; Van Den Heuvel, Dieter; Goethals, Mieke; Cheng, Shaunee (2010) -
EUV processing investigation on state-of-the-art coater/developer system
Shite, Hideo; Bradon, Neil; Shimoaoki, T.; Kobayashi, S.; Nafus, Kathleen; Kosugi, Hitoshi; Foubert, Philippe; Hermans, Jan; Hendrickx, Eric; Goethals, Mieke; Gronheid, Roel; Jehoul, Christiane (2011) -
Track processing optimizations for different EUV resist platforms: preparing for a 3300 baseline process
Foubert, Philippe; Matsunaga, Koichi; Shite, Hideo; Shimoaoki, Takeshi; Nafus, Kathleen; Goethals, Mieke; Van Den Heuvel, Dieter; Hermans, Jan; Hendrickx, Eric; Kosugi, Hitoshi (2013)