Browsing by author "Maurer, Wilhelm"
Now showing items 1-4 of 4
-
Assessment of OPC effectiveness using two-dimensional metrics
Wiaux, Vincent; Philipsen, Vicky; Jonckheere, Rik; Vandenberghe, Geert; Verhaegen, Staf; Hoffmann, Thomas; Ronse, Kurt; Howard, William B.; Maurer, Wilhelm; Preil, Moshe E. (2002) -
Complementary dipole exposure solutions at 0.29k1
Hendrickx, Eric; Torres, Andres; Lafferty, Neal; Le Cam, Laurent; Johnson, Stephen; Reita, Carlo; Vandenberghe, Geert; Maurer, Wilhelm (2005) -
OPC aware mask and wafer metrology
Maurer, Wilhelm; Wiaux, Vincent; Jonckheere, Rik; Philipsen, Vicky; Hoffmann, Thomas; Verhaegen, Staf; Ronse, Kurt; England, Jonathan G.; Howard, William B. (2002) -
Physically-based compact models for fast lithography simulation
Lafferty, Neal; Adam, Kostas; Granik, Yuri; Torres, Andres; Maurer, Wilhelm (2005)