Assessment of OPC effectiveness using two-dimensional metrics

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Authors
Wiaux, Vincent; Philipsen, Vicky; Jonckheere, Rik; Vandenberghe, Geert; Verhaegen, Staf; Hoffmann, Thomas; Ronse, Kurt; Howard, William B.; Maurer, Wilhelm; Preil, Moshe E.
Conference
Optical Microlithography XV
Title
Assessment of OPC effectiveness using two-dimensional metrics
Publication type
Proceedings paper
Embargo date
9999-12-31
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