OPC aware mask and wafer metrology

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Authors
Maurer, Wilhelm; Wiaux, Vincent; Jonckheere, Rik; Philipsen, Vicky; Hoffmann, Thomas; Verhaegen, Staf; Ronse, Kurt; England, Jonathan G.; Howard, William B.
Conference
18th European Conference on Mask Technology for Integrated Circuits and Microcomponents
Title
OPC aware mask and wafer metrology
Publication type
Proceedings paper
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