Publication:

OPC aware mask and wafer metrology

Date

2002

Proceedings Paper

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Author(s)

Maurer, Wilhelm

;

;

Jonckheere, Rik

;

Philipsen, Vicky

;

Hoffmann, Thomas

;

Verhaegen, Staf

;

;

England, Jonathan G.

;

Howard, William B.

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1970 since deposited on 2021-10-14

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Acq. date: 2026-08-10