Browsing by author "Fung, H.-S."
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The effects of vacuum-ultraviolet radiation on defects in low-k organosilicate glass
Xue, P.; Pei, D.; Zheng, H.; Li, W.; Afanasiev, Valeri; Baklanov, Mikhaïl; de Marneffe, Jean-Francois; Lin, Y.-H.; Fung, H.-S.; Chen, C.-C.; Nishi, Y.; Shohet, J.L. (2016)